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Pixel device on deep trench isolation (DTI) structure for image sensor Patent Grant Takahashi , et al. September 29, 2 [Taiwan Semiconductor Manufacturing Co., Ltd.]
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Next generation of Deep Trench Isolation for Smart Power technologies with 120 V high-voltage devices - ScienceDirect
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Figure 4 from A deep trench isolation integrated in a 0.13um BiCD process technology for analog power ICs | Semantic Scholar
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The optimization of deep trench isolation structure for high voltage devices on SOI substrate - ScienceDirect
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Parasitic Suppression in 2D Smart Power ICs Using Deep Trench Isolation: A Simulation Study | SpringerLink
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26: Fabrication of the deep trench isolation and implantations, which... | Download Scientific Diagram
Full-Wave Analysis of Inhomogeneous Deep-Trench Isolation Patterning for Substrate Coupling Reduction and Q-Factor Improvement
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